Dark Field(暗場缺陷檢測)
人人妻人人爱半導體(tǐ)專注於半導體工藝設備的研發、製造、銷售(shòu)及售後一體化服務(wù),提供半(bàn)導體廠商工藝設備的一(yī)站式解決(jué)方案。
關鍵詞:
半導體設備、半導體工藝
所屬分類:
產品描述
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
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